99久久免费精品国产72精品九九_人人爽人人爱_亚洲美女高潮久久久久_无码av免费毛片一区二区

工(gong)藝(yi)(yi)過程(cheng)(cheng)綜述  硅(gui)片加工(gong)過程(cheng)(cheng)包括許多步(bu)驟(zou)(zou)。所有的(de)(de)步(bu)驟(zou)(zou)概括為三(san)個主要種類(lei)：能(neng)修正物理(li)性能(neng)如尺寸、形狀(zhuang)、平(ping)整度、或一些體(ti)材料的(de)(de)性能(neng)；能(neng)減少不期(qi)望(wang)的(de)(de)表面損傷(shang)的(de)(de)數(shu)量(liang)；或能(neng)消除表面沾污(wu)(wu)和顆粒。硅(gui)片加工(gong)的(de)(de)主要的(de)(de)步(bu)驟(zou)(zou)如表1.1的(de)(de)典型流(liu)程(cheng)(cheng)所示(shi)。工(gong)藝(yi)(yi)步(bu)驟(zou)(zou)的(de)(de)順序是很重要的(de)(de)，因為這(zhe)些步(bu)驟(zou)(zou)的(de)(de)決(jue)定能(neng)使(shi)硅(gui)片受(shou)到盡可能(neng)少的(de)(de)損傷(shang)并(bing)且可以減少硅(gui)片的(de)(de)沾污(wu)(wu)。在以下(xia)的(de)(de)章(zhang)節中，每一步(bu)驟(zou)(zou)都會得到詳細介紹。

硅片加工(gong)過程(cheng)步驟

1.       切片(pian)

2.       激(ji)光標識

3.       倒(dao)角

4.       磨片

5.       腐蝕

6.       背損傷

7.       邊(bian)緣鏡面拋(pao)光

8.       預熱清洗

9.       抵抗穩(wen)定——退火(huo)

10.      背封

11.      粘片(pian)

12.      拋光(guang)

13.      檢查前(qian)清洗(xi)

14.      外觀檢(jian)查

15.      金屬清(qing)洗

16.      擦(ca)片

17.      激光(guang)檢查

18.      包(bao)裝/貨運

切(qie)(qie)片(pian)(pian)（class 500k）  硅(gui)(gui)片(pian)(pian)加工的(de)介紹(shao)中(zhong)，從(cong)(cong)單晶硅(gui)(gui)棒開始(shi)的(de)第一(yi)個(ge)步驟就(jiu)是(shi)(shi)切(qie)(qie)片(pian)(pian)。這(zhe)(zhe)一(yi)步驟的(de)關鍵是(shi)(shi)如何在將(jiang)單晶硅(gui)(gui)棒加工成硅(gui)(gui)片(pian)(pian)時盡可(ke)(ke)能地降低損(sun)耗(hao)，也就(jiu)是(shi)(shi)要(yao)求(qiu)將(jiang)單晶棒盡可(ke)(ke)能多地加工成有用的(de)硅(gui)(gui)片(pian)(pian)。為(wei)了盡量(liang)(liang)(liang)得到最(zui)(zui)好的(de)硅(gui)(gui)片(pian)(pian)，硅(gui)(gui)片(pian)(pian)要(yao)求(qiu)有最(zui)(zui)小(xiao)量(liang)(liang)(liang)的(de)翹曲(qu)和(he)最(zui)(zui)少量(liang)(liang)(liang)的(de)刀縫損(sun)耗(hao)。切(qie)(qie)片(pian)(pian)過(guo)程(cheng)(cheng)(cheng)定義了平整度(du)可(ke)(ke)以基本上適(shi)合器件的(de)制備。切(qie)(qie)片(pian)(pian)過(guo)程(cheng)(cheng)(cheng)中(zhong)有兩(liang)種(zhong)主要(yao)方式(shi)——內圓切(qie)(qie)割和(he)線切(qie)(qie)割。這(zhe)(zhe)兩(liang)種(zhong)形式(shi)的(de)切(qie)(qie)割方式(shi)被應用的(de)原(yuan)因是(shi)(shi)它(ta)們能將(jiang)材料損(sun)失減少到最(zui)(zui)小(xiao)，對(dui)硅(gui)(gui)片(pian)(pian)的(de)損(sun)傷也最(zui)(zui)小(xiao)，并(bing)且允許硅(gui)(gui)片(pian)(pian)的(de)翹曲(qu)也是(shi)(shi)最(zui)(zui)小(xiao)。切(qie)(qie)片(pian)(pian)是(shi)(shi)一(yi)個(ge)相對(dui)較臟的(de)過(guo)程(cheng)(cheng)(cheng)，可(ke)(ke)以描述(shu)為(wei)一(yi)個(ge)研(yan)磨(mo)的(de)過(guo)程(cheng)(cheng)(cheng)，這(zhe)(zhe)一(yi)過(guo)程(cheng)(cheng)(cheng)會產生大量(liang)(liang)(liang)的(de)顆粒(li)和(he)大量(liang)(liang)(liang)的(de)很淺表面損(sun)傷。         硅(gui)(gui)片(pian)(pian)切(qie)(qie)割完成后，所粘的(de)碳板(ban)和(he)用來粘碳板(ban)的(de)粘結劑(ji)必須從(cong)(cong)硅(gui)(gui)片(pian)(pian)上清(qing)除。在這(zhe)(zhe)清(qing)除和(he)清(qing)洗過(guo)程(cheng)(cheng)(cheng)中(zhong)，很重要(yao)的(de)一(yi)點就(jiu)是(shi)(shi)保持硅(gui)(gui)片(pian)(pian)的(de)順序，因為(wei)這(zhe)(zhe)時它(ta)們還(huan)沒有被標識區分。

激(ji)(ji)光(guang)標識(shi)(shi)(Class 500k)  在(zai)(zai)晶(jing)棒被切(qie)割成一(yi)片(pian)(pian)(pian)(pian)(pian)(pian)片(pian)(pian)(pian)(pian)(pian)(pian)硅(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)之后，硅(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)會被用(yong)激(ji)(ji)光(guang)刻上標識(shi)(shi)。一(yi)臺高(gao)功率的(de)(de)(de)(de)激(ji)(ji)光(guang)打印機用(yong)來(lai)在(zai)(zai)硅(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)表(biao)面(mian)刻上標識(shi)(shi)。硅(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)按(an)從(cong)晶(jing)棒切(qie)割下(xia)的(de)(de)(de)(de)相同順序進行編(bian)碼(ma)，因而能知道硅(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)正確位置。這一(yi)編(bian)碼(ma)應(ying)是統一(yi)的(de)(de)(de)(de)，用(yong)來(lai)識(shi)(shi)別硅(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)并(bing)知道它(ta)的(de)(de)(de)(de)來(lai)源。編(bian)碼(ma)能表(biao)明該(gai)硅(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)從(cong)哪(na)一(yi)單(dan)晶(jing)棒的(de)(de)(de)(de)什么(me)(me)位置切(qie)割下(xia)來(lai)的(de)(de)(de)(de)。保持(chi)這樣(yang)的(de)(de)(de)(de)追溯(su)是很重要的(de)(de)(de)(de)，因為(wei)單(dan)晶(jing)的(de)(de)(de)(de)整體特性會隨(sui)著晶(jing)棒的(de)(de)(de)(de)一(yi)頭到另一(yi)頭而變(bian)化。編(bian)號需(xu)刻的(de)(de)(de)(de)足(zu)夠深，從(cong)而到最終硅(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)拋(pao)光(guang)完畢后仍能保持(chi)。在(zai)(zai)硅(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)上刻下(xia)編(bian)碼(ma)后，即使硅(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)有(you)遺(yi)漏，也能追溯(su)到原(yuan)來(lai)位置，而且如果趨向(xiang)明了，那(nei)么(me)(me)就可以采取正確的(de)(de)(de)(de)措施。激(ji)(ji)光(guang)標識(shi)(shi)可以在(zai)(zai)硅(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)正面(mian)也可在(zai)(zai)背(bei)面(mian)，盡管(guan)正面(mian)通常(chang)會被用(yong)到。

倒(dao)角(jiao)  當切片(pian)完成(cheng)后，硅(gui)片(pian)有(you)比較(jiao)尖利的(de)(de)邊緣(yuan)，就需要(yao)進行倒(dao)角(jiao)從而形成(cheng)子彈式的(de)(de)光(guang)滑的(de)(de)邊緣(yuan)。倒(dao)角(jiao)后的(de)(de)硅(gui)片(pian)邊緣(yuan)有(you)低(di)的(de)(de)中心應力，因而使(shi)之更牢固。這個(ge)硅(gui)片(pian)邊緣(yuan)的(de)(de)強化，能使(shi)

表(biao)(biao)(biao)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)為(wei)(wei)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)提(ti)供了(le)一(yi)(yi)(yi)個(ge)(ge)固體(ti)(ti)參(can)考平面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)。粘的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)蠟(la)能(neng)(neng)(neng)(neng)(neng)防止當硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)在(zai)(zai)(zai)(zai)(zai)(zai)一(yi)(yi)(yi)側面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)載(zai)體(ti)(ti)下(xia)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)時(shi)(shi)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)移動。蠟(la)粘片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)只(zhi)對(dui)單(dan)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)有(you)(you)用(yong)(yong)(yong)(yong)。另(ling)一(yi)(yi)(yi)方(fang)(fang)(fang)(fang)(fang)法(fa)(fa)就(jiu)是(shi)(shi)(shi)(shi)(shi)模板(ban)(ban)粘片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)，有(you)(you)兩(liang)種(zhong)(zhong)不(bu)(bu)同(tong)(tong)變異。一(yi)(yi)(yi)種(zhong)(zhong)只(zhi)適(shi)用(yong)(yong)(yong)(yong)于(yu)(yu)單(dan)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)，用(yong)(yong)(yong)(yong)這(zhe)(zhe)(zhe)(zhe)(zhe)種(zhong)(zhong)方(fang)(fang)(fang)(fang)(fang)法(fa)(fa)，硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)被(bei)固定在(zai)(zai)(zai)(zai)(zai)(zai)一(yi)(yi)(yi)圓的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)模板(ban)(ban)上，再放(fang)置(zhi)(zhi)在(zai)(zai)(zai)(zai)(zai)(zai)軟(ruan)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)襯(chen)墊上。這(zhe)(zhe)(zhe)(zhe)(zhe)一(yi)(yi)(yi)襯(chen)墊能(neng)(neng)(neng)(neng)(neng)提(ti)供足夠的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)摩(mo)擦力因(yin)而(er)在(zai)(zai)(zai)(zai)(zai)(zai)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)時(shi)(shi)，硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)邊(bian)緣不(bu)(bu)會完(wan)全支撐到(dao)側面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)載(zai)體(ti)(ti)，硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)就(jiu)不(bu)(bu)是(shi)(shi)(shi)(shi)(shi)硬(ying)接觸(chu)，而(er)是(shi)(shi)(shi)(shi)(shi)“漂浮”在(zai)(zai)(zai)(zai)(zai)(zai)物(wu)體(ti)(ti)上。當正面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)進(jin)行(xing)(xing)(xing)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)時(shi)(shi)，單(dan)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)粘片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)保護(hu)了(le)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)背面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)。另(ling)一(yi)(yi)(yi)種(zhong)(zhong)方(fang)(fang)(fang)(fang)(fang)法(fa)(fa)適(shi)用(yong)(yong)(yong)(yong)于(yu)(yu)雙(shuang)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)。用(yong)(yong)(yong)(yong)這(zhe)(zhe)(zhe)(zhe)(zhe)種(zhong)(zhong)方(fang)(fang)(fang)(fang)(fang)法(fa)(fa)，放(fang)置(zhi)(zhi)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)模板(ban)(ban)上下(xia)兩(liang)側都(dou)是(shi)(shi)(shi)(shi)(shi)敞開的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)，通常(chang)兩(liang)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)都(dou)敞開的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)模板(ban)(ban)稱為(wei)(wei)載(zai)體(ti)(ti)。這(zhe)(zhe)(zhe)(zhe)(zhe)種(zhong)(zhong)方(fang)(fang)(fang)(fang)(fang)法(fa)(fa)可(ke)(ke)以允許(xu)在(zai)(zai)(zai)(zai)(zai)(zai)一(yi)(yi)(yi)臺機(ji)(ji)(ji)(ji)器上進(jin)行(xing)(xing)(xing)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)時(shi)(shi)，兩(liang)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)能(neng)(neng)(neng)(neng)(neng)同(tong)(tong)時(shi)(shi)進(jin)行(xing)(xing)(xing)，操作(zuo)類似于(yu)(yu)磨(mo)(mo)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)機(ji)(ji)(ji)(ji)。硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)兩(liang)個(ge)(ge)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)襯(chen)墊放(fang)置(zhi)(zhi)在(zai)(zai)(zai)(zai)(zai)(zai)相(xiang)反(fan)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)方(fang)(fang)(fang)(fang)(fang)向(xiang)(xiang)，這(zhe)(zhe)(zhe)(zhe)(zhe)樣(yang)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)被(bei)推向(xiang)(xiang)一(yi)(yi)(yi)個(ge)(ge)方(fang)(fang)(fang)(fang)(fang)向(xiang)(xiang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)頂(ding)部時(shi)(shi)和(he)相(xiang)反(fan)方(fang)(fang)(fang)(fang)(fang)向(xiang)(xiang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)底部，產生(sheng)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)應力會相(xiang)互抵消。這(zhe)(zhe)(zhe)(zhe)(zhe)就(jiu)有(you)(you)利于(yu)(yu)防止硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)被(bei)推向(xiang)(xiang)堅硬(ying)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)載(zai)體(ti)(ti)而(er)導致(zhi)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)邊(bian)緣遭到(dao)損(sun)(sun)壞(huai)。除(chu)(chu)(chu)(chu)了(le)許(xu)多(duo)加載(zai)在(zai)(zai)(zai)(zai)(zai)(zai)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)邊(bian)緣負荷，當硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)隨載(zai)體(ti)(ti)運轉(zhuan)時(shi)(shi)，邊(bian)緣不(bu)(bu)大(da)可(ke)(ke)能(neng)(neng)(neng)(neng)(neng)會被(bei)損(sun)(sun)壞(huai)。拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)（Class ≤1k）  硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)目的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)是(shi)(shi)(shi)(shi)(shi)得(de)(de)到(dao)一(yi)(yi)(yi)非常(chang)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)滑(hua)、平整、無任(ren)何損(sun)(sun)傷(shang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)表(biao)(biao)(biao)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)。拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)過(guo)(guo)(guo)程(cheng)(cheng)類似于(yu)(yu)磨(mo)(mo)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)過(guo)(guo)(guo)程(cheng)(cheng)，只(zhi)是(shi)(shi)(shi)(shi)(shi)過(guo)(guo)(guo)程(cheng)(cheng)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)基(ji)礎不(bu)(bu)同(tong)(tong)。磨(mo)(mo)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)時(shi)(shi)，硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)進(jin)行(xing)(xing)(xing)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)是(shi)(shi)(shi)(shi)(shi)機(ji)(ji)(ji)(ji)械(xie)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)研(yan)磨(mo)(mo)；而(er)在(zai)(zai)(zai)(zai)(zai)(zai)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)時(shi)(shi)，是(shi)(shi)(shi)(shi)(shi)一(yi)(yi)(yi)個(ge)(ge)化學(xue)/機(ji)(ji)(ji)(ji)械(xie)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)過(guo)(guo)(guo)程(cheng)(cheng)。這(zhe)(zhe)(zhe)(zhe)(zhe)個(ge)(ge)在(zai)(zai)(zai)(zai)(zai)(zai)操作(zuo)原理(li)上的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)不(bu)(bu)同(tong)(tong)是(shi)(shi)(shi)(shi)(shi)造成拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)能(neng)(neng)(neng)(neng)(neng)比(bi)磨(mo)(mo)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)得(de)(de)到(dao)更光(guang)(guang)(guang)(guang)(guang)(guang)(guang)滑(hua)表(biao)(biao)(biao)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)原因(yin)。拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)時(shi)(shi)，用(yong)(yong)(yong)(yong)特(te)制的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)襯(chen)墊和(he)特(te)殊(shu)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)砂(sha)(sha)對(dui)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)進(jin)行(xing)(xing)(xing)化學(xue)/機(ji)(ji)(ji)(ji)械(xie)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)。硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)是(shi)(shi)(shi)(shi)(shi)旋(xuan)轉(zhuan)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)，在(zai)(zai)(zai)(zai)(zai)(zai)一(yi)(yi)(yi)定壓力下(xia)，并經覆蓋在(zai)(zai)(zai)(zai)(zai)(zai)襯(chen)墊上的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)研(yan)磨(mo)(mo)砂(sha)(sha)。拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)砂(sha)(sha)由硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)膠和(he)一(yi)(yi)(yi)特(te)殊(shu)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)高pH值的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)化學(xue)試劑(ji)組成。這(zhe)(zhe)(zhe)(zhe)(zhe)種(zhong)(zhong)高pH的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)化學(xue)試劑(ji)能(neng)(neng)(neng)(neng)(neng)氧(yang)化硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)表(biao)(biao)(biao)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)，又以機(ji)(ji)(ji)(ji)械(xie)方(fang)(fang)(fang)(fang)(fang)式用(yong)(yong)(yong)(yong)含有(you)(you)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)膠的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)砂(sha)(sha)將氧(yang)化層從(cong)表(biao)(biao)(biao)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)磨(mo)(mo)去(qu)。硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)通常(chang)要經多(duo)步拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)。第一(yi)(yi)(yi)步是(shi)(shi)(shi)(shi)(shi)粗拋(pao)(pao)(pao)(pao)，用(yong)(yong)(yong)(yong)較硬(ying)襯(chen)墊，拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)砂(sha)(sha)更易與之反(fan)應，而(er)且比(bi)后面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)中(zhong)用(yong)(yong)(yong)(yong)到(dao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)砂(sha)(sha)中(zhong)有(you)(you)更多(duo)粗糙的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)膠顆粒(li)。第一(yi)(yi)(yi)步是(shi)(shi)(shi)(shi)(shi)為(wei)(wei)了(le)清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)除(chu)(chu)(chu)(chu)腐蝕(shi)斑和(he)一(yi)(yi)(yi)些(xie)(xie)機(ji)(ji)(ji)(ji)械(xie)損(sun)(sun)傷(shang)。在(zai)(zai)(zai)(zai)(zai)(zai)接下(xia)來(lai)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)中(zhong)，用(yong)(yong)(yong)(yong)軟(ruan)襯(chen)、含較少(shao)化學(xue)試劑(ji)和(he)細的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)膠顆粒(li)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)砂(sha)(sha)。清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)除(chu)(chu)(chu)(chu)剩(sheng)余(yu)損(sun)(sun)傷(shang)和(he)薄霧(wu)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)最終(zhong)(zhong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)稱為(wei)(wei)精拋(pao)(pao)(pao)(pao)。檢(jian)查(cha)(cha)前(qian)清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)（class 10）  硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)后，表(biao)(biao)(biao)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)有(you)(you)大(da)量的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)沾污物(wu)，絕大(da)部分(fen)是(shi)(shi)(shi)(shi)(shi)來(lai)自(zi)于(yu)(yu)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)過(guo)(guo)(guo)程(cheng)(cheng)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)顆粒(li)。拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)過(guo)(guo)(guo)程(cheng)(cheng)是(shi)(shi)(shi)(shi)(shi)一(yi)(yi)(yi)個(ge)(ge)化學(xue)/機(ji)(ji)(ji)(ji)械(xie)過(guo)(guo)(guo)程(cheng)(cheng)，集中(zhong)了(le)大(da)量的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)顆粒(li)。為(wei)(wei)了(le)能(neng)(neng)(neng)(neng)(neng)對(dui)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)進(jin)行(xing)(xing)(xing)檢(jian)查(cha)(cha)，需進(jin)行(xing)(xing)(xing)清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)以除(chu)(chu)(chu)(chu)去(qu)大(da)部分(fen)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)顆粒(li)。通過(guo)(guo)(guo)這(zhe)(zhe)(zhe)(zhe)(zhe)次清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)，硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)潔度(du)仍不(bu)(bu)能(neng)(neng)(neng)(neng)(neng)滿(man)足客戶的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)要求(qiu)，但能(neng)(neng)(neng)(neng)(neng)對(dui)其進(jin)行(xing)(xing)(xing)檢(jian)查(cha)(cha)了(le)通常(chang)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)方(fang)(fang)(fang)(fang)(fang)法(fa)(fa)是(shi)(shi)(shi)(shi)(shi)在(zai)(zai)(zai)(zai)(zai)(zai)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)后用(yong)(yong)(yong)(yong)RCA SC-1清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)液。有(you)(you)時(shi)(shi)用(yong)(yong)(yong)(yong)SC-1清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)時(shi)(shi)，同(tong)(tong)時(shi)(shi)還(huan)用(yong)(yong)(yong)(yong)磁超(chao)聲清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)能(neng)(neng)(neng)(neng)(neng)更為(wei)(wei)有(you)(you)效(xiao)(xiao)。另(ling)一(yi)(yi)(yi)方(fang)(fang)(fang)(fang)(fang)法(fa)(fa)是(shi)(shi)(shi)(shi)(shi)先用(yong)(yong)(yong)(yong)H2SO4/H2O2，再用(yong)(yong)(yong)(yong)HF清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)。相(xiang)比(bi)之下(xia)，這(zhe)(zhe)(zhe)(zhe)(zhe)種(zhong)(zhong)方(fang)(fang)(fang)(fang)(fang)法(fa)(fa)更能(neng)(neng)(neng)(neng)(neng)有(you)(you)效(xiao)(xiao)清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)除(chu)(chu)(chu)(chu)金(jin)(jin)(jin)屬(shu)(shu)沾污。經過(guo)(guo)(guo)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)、清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)之后，就(jiu)可(ke)(ke)以進(jin)行(xing)(xing)(xing)檢(jian)查(cha)(cha)了(le)。在(zai)(zai)(zai)(zai)(zai)(zai)檢(jian)查(cha)(cha)過(guo)(guo)(guo)程(cheng)(cheng)中(zhong)，電阻率、翹曲度(du)、總厚度(du)超(chao)差和(he)平整度(du)等(deng)都(dou)要測(ce)試。所有(you)(you)這(zhe)(zhe)(zhe)(zhe)(zhe)些(xie)(xie)測(ce)量參(can)數都(dou)要用(yong)(yong)(yong)(yong)無接觸(chu)方(fang)(fang)(fang)(fang)(fang)法(fa)(fa)測(ce)試，因(yin)而(er)拋(pao)(pao)(pao)(pao)光(guang)(guang)(guang)(guang)(guang)(guang)(guang)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)才不(bu)(bu)會受到(dao)損(sun)(sun)傷(shang)。在(zai)(zai)(zai)(zai)(zai)(zai)這(zhe)(zhe)(zhe)(zhe)(zhe)點上，硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)必(bi)須最終(zhong)(zhong)滿(man)足客戶的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)尺(chi)寸性(xing)能(neng)(neng)(neng)(neng)(neng)要求(qiu)，否則就(jiu)會被(bei)淘汰。金(jin)(jin)(jin)屬(shu)(shu)物(wu)去(qu)除(chu)(chu)(chu)(chu)清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)  硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)檢(jian)查(cha)(cha)完(wan)后，就(jiu)要進(jin)行(xing)(xing)(xing)最終(zhong)(zhong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)以清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)除(chu)(chu)(chu)(chu)剩(sheng)余(yu)在(zai)(zai)(zai)(zai)(zai)(zai)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)表(biao)(biao)(biao)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)所有(you)(you)顆粒(li)。主(zhu)要的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)沾污物(wu)是(shi)(shi)(shi)(shi)(shi)檢(jian)查(cha)(cha)前(qian)清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)后仍留在(zai)(zai)(zai)(zai)(zai)(zai)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)表(biao)(biao)(biao)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)金(jin)(jin)(jin)屬(shu)(shu)離(li)(li)(li)(li)子(zi)(zi)(zi)(zi)(zi)。這(zhe)(zhe)(zhe)(zhe)(zhe)些(xie)(xie)金(jin)(jin)(jin)屬(shu)(shu)離(li)(li)(li)(li)子(zi)(zi)(zi)(zi)(zi)來(lai)自(zi)于(yu)(yu)各不(bu)(bu)同(tong)(tong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)用(yong)(yong)(yong)(yong)到(dao)金(jin)(jin)(jin)屬(shu)(shu)與硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)接觸(chu)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)加工過(guo)(guo)(guo)程(cheng)(cheng)，如切片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)、磨(mo)(mo)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)。一(yi)(yi)(yi)些(xie)(xie)金(jin)(jin)(jin)屬(shu)(shu)離(li)(li)(li)(li)子(zi)(zi)(zi)(zi)(zi)甚至來(lai)自(zi)于(yu)(yu)前(qian)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)幾(ji)個(ge)(ge)清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)過(guo)(guo)(guo)程(cheng)(cheng)中(zhong)用(yong)(yong)(yong)(yong)到(dao)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)化學(xue)試劑(ji)。因(yin)此，最終(zhong)(zhong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)主(zhu)要是(shi)(shi)(shi)(shi)(shi)為(wei)(wei)了(le)清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)除(chu)(chu)(chu)(chu)殘留在(zai)(zai)(zai)(zai)(zai)(zai)硅(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)(gui)片(pian)(pian)(pian)(pian)(pian)(pian)(pian)(pian)表(biao)(biao)(biao)面(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)(mian)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)金(jin)(jin)(jin)屬(shu)(shu)離(li)(li)(li)(li)子(zi)(zi)(zi)(zi)(zi)。這(zhe)(zhe)(zhe)(zhe)(zhe)樣(yang)做(zuo)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)原因(yin)是(shi)(shi)(shi)(shi)(shi)金(jin)(jin)(jin)屬(shu)(shu)離(li)(li)(li)(li)子(zi)(zi)(zi)(zi)(zi)能(neng)(neng)(neng)(neng)(neng)導致(zhi)少(shao)數載(zai)流子(zi)(zi)(zi)(zi)(zi)壽命，從(cong)而(er)會使器件性(xing)能(neng)(neng)(neng)(neng)(neng)降低。SC-1標準(zhun)清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)液對(dui)清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)除(chu)(chu)(chu)(chu)金(jin)(jin)(jin)屬(shu)(shu)離(li)(li)(li)(li)子(zi)(zi)(zi)(zi)(zi)不(bu)(bu)是(shi)(shi)(shi)(shi)(shi)很有(you)(you)效(xiao)(xiao)。因(yin)此，要用(yong)(yong)(yong)(yong)不(bu)(bu)同(tong)(tong)的(de)(de)(de)(de)(de)(de)(de)(de)(de)(de)清(qing)(qing)(qing)(qing)(qing)(qing)(qing)(qing)洗(xi)(xi)液，如HCl，必(bi)須用(yong)(yong)(yong)(yong)到(dao)。

擦(ca)片  在(zai)用HCl清洗完硅(gui)片后，可能還(huan)會在(zai)表面(mian)吸附一(yi)些顆(ke)粒。一(yi)些制造(zao)商選擇PVA制的刷子來清除這些殘留顆(ke)粒。在(zai)擦(ca)洗過程(cheng)中，純水(shui)或氨水(shui)（NH4OH）應流經硅(gui)片表面(mian)以帶走沾(zhan)附的顆(ke)粒。用PVA擦(ca)片是清除顆(ke)粒的有效(xiao)手(shou)段。

激(ji)光(guang)(guang)檢查  硅片的最(zui)終(zhong)清洗完成(cheng)后，就需要(yao)檢查表(biao)(biao)面(mian)(mian)顆粒(li)和表(biao)(biao)面(mian)(mian)缺陷(xian)。激(ji)光(guang)(guang)檢查儀能探測到表(biao)(biao)面(mian)(mian)的顆粒(li)和缺陷(xian)。因為激(ji)光(guang)(guang)是短波中高強(qiang)度的波源。激(ji)光(guang)(guang)在硅片表(biao)(biao)面(mian)(mian)反(fan)射。如果表(biao)(biao)面(mian)(mian)沒有任何問題，光(guang)(guang)打(da)到(dao)(dao)硅片表(biao)面就會(hui)(hui)以相同角度反射(she)。然而，如果光(guang)(guang)打(da)到(dao)(dao)顆粒上或打(da)到(dao)(dao)粗(cu)糙的平面上，光(guang)(guang)就不會(hui)(hui)以相同角度反射(she)。反射(she)的光(guang)(guang)會(hui)(hui)向各個方向傳播并(bing)能(neng)在不同角度被探測到(dao)(dao)。

包(bao)裝(zhuang)/貨運  盡(jin)管(guan)如此，可(ke)(ke)能(neng)(neng)(neng)(neng)還(huan)沒有考慮的(de)(de)(de)(de)(de)非常(chang)周到，硅(gui)(gui)片(pian)(pian)(pian)的(de)(de)(de)(de)(de)包(bao)裝(zhuang)是(shi)(shi)非常(chang)重(zhong)要(yao)的(de)(de)(de)(de)(de)。包(bao)裝(zhuang)的(de)(de)(de)(de)(de)目的(de)(de)(de)(de)(de)是(shi)(shi)為(wei)(wei)(wei)硅(gui)(gui)片(pian)(pian)(pian)提(ti)(ti)供(gong)(gong)一(yi)(yi)個(ge)無塵的(de)(de)(de)(de)(de)環境，并(bing)(bing)(bing)使(shi)硅(gui)(gui)片(pian)(pian)(pian)在(zai)運輸時(shi)不受到任(ren)何損傷；包(bao)裝(zhuang)還(huan)可(ke)(ke)以(yi)防(fang)(fang)止硅(gui)(gui)片(pian)(pian)(pian)受潮。如果一(yi)(yi)片(pian)(pian)(pian)好(hao)的(de)(de)(de)(de)(de)硅(gui)(gui)片(pian)(pian)(pian)被放(fang)置在(zai)一(yi)(yi)容器(qi)內，并(bing)(bing)(bing)讓它(ta)受到污染，它(ta)的(de)(de)(de)(de)(de)污染程度會(hui)與在(zai)硅(gui)(gui)片(pian)(pian)(pian)加(jia)工(gong)過程中的(de)(de)(de)(de)(de)任(ren)何階段一(yi)(yi)樣(yang)嚴(yan)(yan)重(zhong)，甚至(zhi)認為(wei)(wei)(wei)這(zhe)是(shi)(shi)更嚴(yan)(yan)重(zhong)的(de)(de)(de)(de)(de)問(wen)題，因為(wei)(wei)(wei)在(zai)硅(gui)(gui)片(pian)(pian)(pian)生(sheng)(sheng)產過程中，隨著(zhu)每一(yi)(yi)步(bu)驟(zou)的(de)(de)(de)(de)(de)完成(cheng)(cheng)(cheng)，硅(gui)(gui)片(pian)(pian)(pian)的(de)(de)(de)(de)(de)價值也在(zai)不斷(duan)上升。理想的(de)(de)(de)(de)(de)包(bao)裝(zhuang)是(shi)(shi)既能(neng)(neng)(neng)(neng)提(ti)(ti)供(gong)(gong)清(qing)潔(jie)的(de)(de)(de)(de)(de)環境，又能(neng)(neng)(neng)(neng)控(kong)制(zhi)(zhi)保存和(he)(he)運輸時(shi)的(de)(de)(de)(de)(de)小環境的(de)(de)(de)(de)(de)整潔(jie)。典(dian)型的(de)(de)(de)(de)(de)運輸用(yong)(yong)的(de)(de)(de)(de)(de)容器(qi)是(shi)(shi)用(yong)(yong)聚丙烯、聚乙烯或一(yi)(yi)些其他塑(su)料(liao)材料(liao)制(zhi)(zhi)成(cheng)(cheng)(cheng)。這(zhe)些塑(su)料(liao)應不會(hui)釋放(fang)任(ren)何氣體并(bing)(bing)(bing)且是(shi)(shi)無塵的(de)(de)(de)(de)(de)，如此硅(gui)(gui)片(pian)(pian)(pian)表(biao)面(mian)(mian)才不會(hui)被污染。  電(dian)(dian)(dian)(dian)池(chi)(chi)(chi)(chi)片(pian)(pian)(pian)一(yi)(yi)般(ban)分(fen)為(wei)(wei)(wei)單(dan)(dan)(dan)(dan)晶(jing)(jing)硅(gui)(gui)、多晶(jing)(jing)硅(gui)(gui)、和(he)(he)非晶(jing)(jing)硅(gui)(gui) 單(dan)(dan)(dan)(dan)晶(jing)(jing)硅(gui)(gui)太(tai)陽(yang)(yang)能(neng)(neng)(neng)(neng)電(dian)(dian)(dian)(dian)池(chi)(chi)(chi)(chi)是(shi)(shi)當前開發得最(zui)快的(de)(de)(de)(de)(de)一(yi)(yi)種太(tai) 陽(yang)(yang)能(neng)(neng)(neng)(neng)電(dian)(dian)(dian)(dian)池(chi)(chi)(chi)(chi)，它(ta)的(de)(de)(de)(de)(de)構造和(he)(he)生(sheng)(sheng)產工(gong)藝已定(ding)型，產品已廣泛用(yong)(yong)于空間和(he)(he)地(di)面(mian)(mian)。這(zhe)種太(tai)陽(yang)(yang)能(neng)(neng)(neng)(neng)電(dian)(dian)(dian)(dian)池(chi)(chi)(chi)(chi)以(yi)高純的(de)(de)(de)(de)(de)單(dan)(dan)(dan)(dan)晶(jing)(jing)硅(gui)(gui)棒為(wei)(wei)(wei)原料(liao)。為(wei)(wei)(wei)了 降(jiang)低生(sheng)(sheng)產成(cheng)(cheng)(cheng)本，現在(zai)地(di)面(mian)(mian)應用(yong)(yong)的(de)(de)(de)(de)(de)太(tai)陽(yang)(yang)能(neng)(neng)(neng)(neng)電(dian)(dian)(dian)(dian)池(chi)(chi)(chi)(chi)等(deng)采用(yong)(yong)太(tai)陽(yang)(yang)能(neng)(neng)(neng)(neng)級的(de)(de)(de)(de)(de)單(dan)(dan)(dan)(dan)晶(jing)(jing)硅(gui)(gui)棒，材料(liao)性能(neng)(neng)(neng)(neng)指標有所(suo)放(fang)寬。有的(de)(de)(de)(de)(de)也可(ke)(ke)使(shi)用(yong)(yong)半導體器(qi)件(jian)(jian)加(jia)工(gong)的(de)(de)(de)(de)(de)頭尾料(liao)和(he)(he)廢次單(dan)(dan)(dan)(dan)晶(jing)(jing)硅(gui)(gui)材料(liao)，經(jing)過復(fu) 拉制(zhi)(zhi)成(cheng)(cheng)(cheng)太(tai)陽(yang)(yang)能(neng)(neng)(neng)(neng)電(dian)(dian)(dian)(dian)池(chi)(chi)(chi)(chi)專用(yong)(yong)的(de)(de)(de)(de)(de)單(dan)(dan)(dan)(dan)晶(jing)(jing)硅(gui)(gui)棒。     將單(dan)(dan)(dan)(dan)晶(jing)(jing)硅(gui)(gui)棒切成(cheng)(cheng)(cheng)片(pian)(pian)(pian)，一(yi)(yi)般(ban)片(pian)(pian)(pian)厚約0.3毫米(mi)。硅(gui)(gui)片(pian)(pian)(pian)經(jing)過拋磨、清(qing)洗等(deng)工(gong)序，制(zhi)(zhi)成(cheng)(cheng)(cheng)待加(jia)工(gong)的(de)(de)(de)(de)(de)原料(liao)硅(gui)(gui)片(pian)(pian)(pian)。加(jia)工(gong)太(tai)陽(yang)(yang)能(neng)(neng)(neng)(neng)電(dian)(dian)(dian)(dian)池(chi)(chi)(chi)(chi)片(pian)(pian)(pian)，首先要(yao)在(zai)硅(gui)(gui)片(pian)(pian)(pian)上摻(chan)(chan)雜(za)和(he)(he)擴散(san)(san)，一(yi)(yi)般(ban)摻(chan)(chan)雜(za)物為(wei)(wei)(wei) 微量的(de)(de)(de)(de)(de)硼(peng)、磷(lin)、銻等(deng)。擴散(san)(san)是(shi)(shi)在(zai)石(shi)英(ying)管(guan)制(zhi)(zhi)成(cheng)(cheng)(cheng)的(de)(de)(de)(de)(de)高溫擴散(san)(san)爐中進行(xing)。這(zhe)樣(yang)就硅(gui)(gui)片(pian)(pian)(pian)上形(xing)成(cheng)(cheng)(cheng)P>N結。然后(hou)采用(yong)(yong)絲網印刷法，精(jing)配好(hao)的(de)(de)(de)(de)(de)銀漿印在(zai)硅(gui)(gui)片(pian)(pian)(pian)上做成(cheng)(cheng)(cheng)柵(zha)線，經(jing) 過燒結，同(tong)時(shi)制(zhi)(zhi)成(cheng)(cheng)(cheng)背(bei)電(dian)(dian)(dian)(dian)極，并(bing)(bing)(bing)在(zai)有柵(zha)線的(de)(de)(de)(de)(de)面(mian)(mian)涂覆減反(fan)射源(yuan)，以(yi)防(fang)(fang)大量的(de)(de)(de)(de)(de)光(guang)子(zi)被光(guang)滑的(de)(de)(de)(de)(de)硅(gui)(gui)片(pian)(pian)(pian)表(biao)面(mian)(mian)反(fan)射掉。因此，單(dan)(dan)(dan)(dan)晶(jing)(jing)硅(gui)(gui)太(tai)陽(yang)(yang)能(neng)(neng)(neng)(neng)電(dian)(dian)(dian)(dian)池(chi)(chi)(chi)(chi)的(de)(de)(de)(de)(de)單(dan)(dan)(dan)(dan)體片(pian)(pian)(pian)就制(zhi)(zhi)成(cheng)(cheng)(cheng)了。單(dan)(dan)(dan)(dan)體片(pian)(pian)(pian)經(jing)過抽查 檢(jian)驗，即可(ke)(ke)按所(suo)需(xu)要(yao)的(de)(de)(de)(de)(de)規格(ge)組(zu)(zu)裝(zhuang)成(cheng)(cheng)(cheng)太(tai)陽(yang)(yang)能(neng)(neng)(neng)(neng)電(dian)(dian)(dian)(dian)池(chi)(chi)(chi)(chi)組(zu)(zu)件(jian)(jian)（太(tai)陽(yang)(yang)能(neng)(neng)(neng)(neng)電(dian)(dian)(dian)(dian)池(chi)(chi)(chi)(chi)板），用(yong)(yong)串聯和(he)(he)并(bing)(bing)(bing)聯的(de)(de)(de)(de)(de)方法構成(cheng)(cheng)(cheng)一(yi)(yi)定(ding)的(de)(de)(de)(de)(de)輸出電(dian)(dian)(dian)(dian)壓和(he)(he)電(dian)(dian)(dian)(dian)流。最(zui)后(hou)用(yong)(yong)框架和(he)(he)材料(liao)進行(xing)封裝(zhuang)。用(yong)(yong)戶根(gen)據系統 設計，可(ke)(ke)將太(tai)陽(yang)(yang)能(neng)(neng)(neng)(neng)電(dian)(dian)(dian)(dian)池(chi)(chi)(chi)(chi)組(zu)(zu)件(jian)(jian)組(zu)(zu)成(cheng)(cheng)(cheng)各種大小不同(tong)的(de)(de)(de)(de)(de)太(tai)陽(yang)(yang)能(neng)(neng)(neng)(neng)電(dian)(dian)(dian)(dian)池(chi)(chi)(chi)(chi)方陣，亦稱太(tai)陽(yang)(yang)能(neng)(neng)(neng)(neng)電(dian)(dian)(dian)(dian)池(chi)(chi)(chi)(chi)陣列。目前單(dan)(dan)(dan)(dan)晶(jing)(jing)硅(gui)(gui)太(tai)陽(yang)(yang)能(neng)(neng)(neng)(neng)電(dian)(dian)(dian)(dian)池(chi)(chi)(chi)(chi)的(de)(de)(de)(de)(de)光(guang)電(dian)(dian)(dian)(dian)轉換效(xiao)率為(wei)(wei)(wei)15％左右(you)，實驗室成(cheng)(cheng)(cheng)果也有 20％以(yi)上的(de)(de)(de)(de)(de)。